Using the Rayleigh criterion, calculate the minimum feature size that can be resolved in a system with a 0.18 NA lens when g-line and i-line radiation from a Mercury spectrum is used. Repeat this exercise for 0.30 NA and 0.36 NA lenses. Assume a k-factor k1.

a)

# for a g line, R = 1.211 μm

# for an I-line, R = 1.013 μm

b)

# for a g line, R = 0.726 μm

# for an I-line, R = 0.243 μm

c)

# for a g line, R = 0.605 μm

# for an I-line, R = 0.608 μm

Explanation:

We know that;

Rayleigh Resolution R = 0.5 × λ/NA

for a g line, λ = 436 nm

for an I-line λ = 365 nm

a)

Now when NA = 0.18

# for a g line, λ = 436 nm

R = 0.5 × 436/0.18 =  1.211 μm

# for an I-line λ = 365 nm

R = 0.5 × 365/0.18 =  1.013 μm

b)

when NA = 0.30

# for a g line, λ = 436 nm

R = 0.5 × 436/0.30 =  0.726 μm

# for an I-line λ = 365 nm

R = 0.5 × 365/0.30 =  0.243 μm

c)

when NA = 0.36

# for a g line, λ = 436 nm

R = 0.5 × 436/0.36 =  0.605 μm

# for an I-line λ = 365 nm

R = 0.5 × 365/0.30 =  0.608 μm

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