Engineering, 30.11.2021 03:30 hannahkharel2
Plot resolution and depth of field as a function of exposure wavelength for a projection aligner with 100 nm l 500 nm. Use k 0.75 and NA 0.26. On the same plots, recalculate these functions for NA 0.41. Discuss the implications of these plots for the technologist that must manufacture transistors with 0.5-m features.
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Plot resolution and depth of field as a function of exposure wavelength for a projection aligner wit...
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